SSEC 3302 Resist Removal and Wafer Cleaning Machine

SSEC 3302 Resist Removal and Wafer Cleaning Machine
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Location:Santa Barbara, CA
or
Call 805-895-7767
Description
SSEC CLEAN 3300
MODEL: M3302
208 VAC, 3PH, 60Hz, 30 AMP
Date of Mfg. 8/30/05
AC Dwg No. 330i1712
1) the wafer is soaked in the mix of solvents (so-called cleaning by submersion)
2) there is processing by spray solvents ( so-called Fan Spray Processing) and nitrogen drying stage.
The unit has so-called dry-in/dry-out system (dry wafers in/ dry wafers out).
Post DRIE etch TSV cleaning is essential to the reliability of 2.5D and 3D IC devices. SSECs proprietary
soak and spray technology minimizes spray time and chemistry use for lower cost-of-ownership than
conventional wet bench or single spray approaches; it achieved 100% photoresist and sidewall
fluoropolymer removal 5x faster than spray only.
The tool features equal-time soak software for process control. Each wafer soaks in heated, recirculating
solvent long enough to penetrate the polymer residue. Following wet transfer to the spray station, the
wafer is subject to a high-pressure spray to rapidly remove remaining residue. The result is 100%
photoresist and polymer removal. Soak and spray takes 88% less time and 77.5% less chemistry than
spray-only processes.
System was de-installed in working operational condition. All returns must comply with stated Return Policy. Please continue:
PAYMENT OPTIONS:
We accept Paypal, Company Check, Wire Transfers.Please call (805) 895 7767.
TAXES & FEES:
California Sales Tax applies if order within California at 8%. Handling charges may apply. Your cost is the price of your item, shipping/handling charge, insurance, and sales tax if applicable. .
REFUNDS & RETURNS
:
No returns after 14 days. Returns must have good reason for return, i.e. defective items, missing items, or items not described accurately.Returned items must be in same condition as shipped for refund.PLEASE Contact before leaving Negative Feedback in the seller review.
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IF THERE ARE ANY PROBLEMS WITH THE ITEM DO NOT TRY TO REPAIR AND INVESTIGATE. CONTACT US IMMEDIATELY.
WARRANTY IS NULL VOID IF ANY ITEM IS TAMPERED WITH, OPENED OR DISASSEMBLED.
IF THERE ARE ANY PROBLEMS WITH THE ITEM DO NOT TRY TO REPAIR AND INVESTIGATE.
CONTACT US IMMEDIATELY.
WARRANTY IS NULL VOID IF ANY ITEM IS TAMPERED WITH, OPENED OR DISASSEMBLED.
WE HAVE SEVERAL WAREHOUSES.
Please check with us about ITEM'S AVAILABILITY prior to ordering.
UPON RECEIPT OF YOUR PURCHASE PLEASE PHOTOGRAPH, DOCUMENT,
AND SAVE ALL PACKAGING WHETHER DAMAGE IS VISIBLE OR NOT. ALL CLAIMS MUST BE
REPORTED AND ACKNOWLEDGED WITHIN 72 HRS OF RECEIPT.
Specifications
Model | M3302 |
Condition | Used |